| Material |
Sapphire Wafer(Semi Auto and Full Auto Cleaner) |
| Wafer Size |
2/4/6 inch |
| Wafer Thickness |
43㎛ |
| Cleaning Bath |
Alkali Detergent with Ultrasonic |
| Rinsing Bath |
Rinse with Ultrasonic |
| Cassette |
25pcs/cassette X 4pcs =100pcs (Based on 6 inch) |
| Circulation |
Circulation and Filtering |
| Capacity |
Over 300pcs / Hr , Efficiency : Over 95% |
| Auto Transfer |
In conveyor → Cleaning & Rinsing → Auto transfer → Out conveyor |
| Dry |
Hot Air Blower (Special design for low wafer breakage) |
| O/P |
10 inch Touch Screen |
| Safety |
Over/level/limit sensor and interlock |
