Final Cleaning M/C
Overview
- This system is designed to clean
silicon safers with basket loaded. - The process includes ultrasonic cleaning,
rinsing and dry with hot air. - Full automatic cleaning process
with capacity of over 6000pcs/hour.
Specification
| Material | Si (Multi & Mono) |
|---|---|
| Wafer Size | 156X156mm (Other size on application) |
| Wafer Thickness | 160 micro (Other size on application) |
| Cleaning Bath | Detergent with Ultrasonic |
| Rinsing Bath | Rinse with Ultrasonic (High Frequency) |
| Cassette | 50pcs/cassette X 4pcs =200pcs |
| Circulation | Circulation and Filtering |
| Capacity | Over 2400pcs / Hr |
| Auto Dosing | Auto dosing station (Optional) |
| Dry | Hot Air Blower (Special design for low wafer breakage) |
| O/P | 10 inch Touch Screen |
| Safety | Over/level/limit sensor and interlock |
