Pre Cleaning M/C
Overview
- This system is cleaning hard dirties and grease
on the sliced wafers just after sawing process. - Full automatic transfer without downtime.
Specification
| Material | Si (Multi & Mono) |
|---|---|
| Wafer Size | 156X156mm (Other size on application) |
| Wafer Thickness | 160 micro (Other size on application) |
| Pre-Clean Bath | Shower and Ultrasonic (Multi Frequency) |
| Deglue Bath | Detergent or Acid |
| Transfer Cart | For loading and unloading (Wet transport) |
| Circulation | Circulation and Filtering |
| Capacity | 4 ~ 5 Block /Hr |
| Auto Dosing | Auto dosing station (Optional) |
| Sludge Recycle | Sludge Recycle system (Optional) |
| O/P | 10 inch Touch Screen |
| Safety | Over/level/limit sensor and interlock |
