Dura Micro
Overview
- Nano Paticle Removal
- Free Metal Contamination
- Low Damage
- Uniform of Acoustic Power
- Easy set-up
- Post CMP Claening
- Solar Cell Wafer Cleaning
- Fine Cleaning Application
Specification
| Model Name | Dura Micro |
|---|---|
| Frequency | 985 kHz ± 1% |
| Output Power[Watt] | Max. 100Watt |
| M/S Effect Area [mm] | 150*34 |
| Size [mm] | 185*66*24 |
| Weight [g] | 500g |
