Spot Type
Overview
- Possible to clean 6”~12” wafer
- Vibration at 1.6MHz is capable of removing more mocroscopic particles.
- The horn does not allow generation of metallic lons.
- The best solution for point - of - operation cleaning needs.
- Easy to install to existing production line.
Specification - Megasonic Unit
| Model | Dura 1MQ |
|---|---|
| Oscillation Frequenc | 1MHz 1.6MHz |
| Power Supply | AC 200-240V AC 100-110V |
| Ambiennt Temperature | Limit 70c |
| Ambient Humidity | 0-80% |
| Remote Control | Provided (Relay or PLC contact) |
| Display | LCD Display |
| Dimension(mm) | 210(W)*250(L)*130(H) |
| Weight | 3.5kg |
| Features | Robust structure design, Dry operation precention signal terminal |
Specification - Spot Unit
| Type | ULMSS-1 |
|---|---|
| Effective cleaning width | 4*1 |
| Nozzie dimension(W*L*H mm) | 30*55*80 |
| Nozzle weigh | 0.6kg |
| Water flow rate | 400-800cc/min |
| Output power | 40W |
*Custom spec size will also be available upon customer request
